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General description
The gas at atmospheric pressure, flows through a proprietary design ; a pure quartz cell is submitted to a high-frequency, high-intensity electromagnetic field.

The K2002 Analyzer is based on a spectroscopic emission cell, which is not a new technique in itself. Rather, it is the frequency, the intensity, the regulation as well as the coupling technique and focusing (stabilizing) electrodes used to keep the plasma stable that make this system stable and selective.

Under these conditions, it becomes the center of a luminous phenomenon (electroluminescence). In fact, this is an electromagnetically induced plasma. A plasma is a collection of charged particles ; In this case, the plasma consists of a stream of argon. This process being an emission technique, it is very useful for quantitative analysis. This technique is not new, but the recent advances in semiconductors as well as in optical coating and devices, make it easier to develop an instrument based on this technology, without the cost normally associated with this category of analytical instruments.

Once the gas is ionized (charged), many spectral lines are emitted.

Here, we think a few words regarding the technique used to create the plasma are necessary. There are many ways of producing light from an argon stream for analytical purposes. The electroluminescence phenomenon includes luninescence from all kinds of electrical discharges, such as sparks, arcs or tubes of different kinds, operating on direct or alternating current of low or high frequency. Recently, some experiments were conducted in the microwave range by surface-wave-induced plasma.

Excitation in these cases results mostly from electron or ion collisions ; it is the kinetic energy of electrons or ions accelerated in an electric field to which the atoms or molecules of the gas are subjected that causes emissions of light.

By any of the previous methods, characteristic emission spectra can be obtained for argon and each substance in it. They usually vary for a given substance, depending on the mode of excitation.

We developed our plasma generator and plasma cell as to minimize the heat generation inside the cell and get a clear spectral line for the substance of interest, i.e. nitrogen.

Once the intense line is identified, we must use a system to filter it out. In our case, instead of a grating, prism or tunable filter, we use an custom made optical filter with special coating that lessens background noise considerably and reduces spectral interference. This filter show an exceptional bloking range. Its main characteristic is its great stability : temperature and humidity and time will not affect its performance it is coupled with a special lens that focuses the optical beam.

The resulting light is directed to a special photodiode, where an electrical current is generated. This current is proportional to the nitrogen level in the gas stream. (Argon or helium).

By regulating the power of the plasma and having close control of plasma position, with the focusing electrodes, we can optimize the sensitivity for a particular spetral ray.

For the K2002 series, the sampling system is made of welded electropolish tubing and VCR type fittings. Furthermore the critical part of the system are temperature regulated by a thermo-cooler system. The plasma cell and generator are also optimize for noise reduction and better stability. For both K2001 and K2002 series a dual background version is available.



Features
  • Display resolution to 10 ppt
  • Plasma emission system
  • Microprocessor controlled
  • No sensor or detector to replace, maintenance free
  • Low sample flow
  • Fast response
Applications
  • Electronic wafer fabs
  • Gas management system
  • Gas purifier efficiency monotoring
  • Specialty gas laboratories
  • High purity Argon plant


Specifications

Detector type :
Single beam. Electromagnetically induced plasma cell. Nonratiometric measurement.
Material : Quartz, single element, vacuum tight to 10 PSI (69 KPAG).
Range :
X1 : 0 - 100 ppb display resolution to 10 ppt
X10 : 0 - 500 ppb display resolution to .1 ppb
X100 : 0 - 5 ppm display resolution to .1 ppm
Accuracy :
± 3 % (or better) of reading on 0 - 50 / 0 - 500 ppb
± 1 % on 5 ppm range
Sensitivity :
.1 ppm (Helium supported mode) / .5 ppb Argon only
Sample flow requirements :
30 cc to 150 sccm
Recommended calibration gas :
Zero : from purifier
Span : 1 to 3 or dilution system
Flow accuracy :
0 to 200 cc ± 1 % full scale
Maximum input burst pressure :
70 PSIG (482 KPAG) (vent at atmospheric pressure)
Maximum input pressure :
5 PSIG, for 50 cc (35.5 KPAG)
Recommended operating pressure :
5 PSIG to 10 PSIG (35.5 KPAG to 69 KPAG)
Operating temperature :
10° C to 35° C (software temperature compensation)
Sample and vent connection :
1/4" VCR
Supporting gas (if selected) :
1/4" VCR
Supply :
115 VAC, 50 - 60 Hz or 220 VAC, 50 - 60 Hz (on order)
Power consumption :
Maximum 35 watts
4 - 20 mA :
4 - 20 mA isolated output
Maximum load impedance : 600 ohm at 20 mA DC
Insulation : 750 VDC or AC peak maximum
Response time :
Less than 90 seconds for 90% step change at 75 sccm (typically 60 seconds)
Dimensions :
Standard rack mount 3U, 5.25" high, 18" deep, 19" wide
Operating mode :
  • Argon only, at atmospheric pressure
  • Helium supported or not
  • Detector operating pressure : atmospheric down to 5 mbar (vaccum pump added)
  • These modes are user selectable
Weight :
15 kg (33lbs)
Standard features :
  • Fully microprocessor-controlled, with 4 X 40 LCD display
  • Self diagnostic system software
  • Digital output : 4 digitals outputs. 3 are for range indication and 1 for system status monitoring
  • Two alarms contact output
  • Isolated 4 - 20 mA output
Options :
  • Serial port : RS-232 / 422 / 485 / modem
  • Custom option : contact factory
and UL1244 compliant